Professor
Pen-Tung Sah Micro-Nano Technology institute, Xiamen University
422, Siming Road South, Xiamen, P.R.China
086-592-2187163 (office)
lm@xmu.edu.cn
http://mnems.xmu.edu.cn
Education
· Ph.D, Micro Electronics, 2003，Xidian University, Xi’an City, P.R.China.
· M.S, Micro Electronics, 1994，University of Electronic Science and Technology of China, Chengdu City, P.R.China.
· B.S, Electrical Engineering, 1992，Tianjin University, Tianjin, P.R.China.
Research Interests
· Miniature instrument;
· Thermal conductive two dimensional nano-materials;
· Sensors and actuator;
Projects:
· “MEMS Raman spectrometer Based on Arrayed Waveguide Grating” 2012-2015, 2.8 M (RMB)
· “μ-PERS chip spectrometer”, 2012-2015, 1.5M (RMB)
Selected Publications
Journal paper:
(1) Yifan Li, Beichen Lin, Likai Ge,1 Hongchen Guo, Xinyi Chen and Miao Lu, “Real-time spectroscopic monitoring of photocatalytic activity promoted by graphene in a microfluidic reactor” Sci Rep.;6: 28803. 2016
(2) Chen, X. Y., Guo, H. C., Wang, T., Lu, M. & Wang, T. H. In-situ fabrication of reduced graphene oxide (rGO)/ZnO heterostructure: surface functional groups induced electrical properties. Electrochim Acta 196, 558-564 , 2016
(3) J. Zheng, L. Zhang, A V Kretinin, S V Morozov, Y. Wang, T. Wang, X. Li, F. Ren, J. Zhang, C. Lu, J. Chen, M. Lu, H Wang, A K Geim and K S Novoselov , 2D Materials, 3, 011004, 2016
(4) Tun Wang, Ze-Zhi Zheng, Xing-Xing Feng, Hong Chen, Miao Lu, “Electrical sensing of DNA-hybridization using two-port network based on suspended carbon nanotube membrane”, Biomed Microdevices, 17:103 (7 pp), 2015
(5) Shengfeng Deng, Jinke Lyu, Hongda Sun, Xiaobin Cui, Tun Wang, Miao Lu, “Fabrication of a chirped artificial compound eye for endoscopic imaging fiber bundle by dose-modulated laser lithography and subsequent thermal reflow” Optical Engineering 54(3), 033105, 2015
(6) Hongda Sun, ShengFeng Deng, Xiaobin Cui, Miao Lu, “Fabrication of microlens arrays with varied focal lengths on curved surfaces using electrostatic deformed template”. J. Micromech. Microeng. 24, 065008 (6pp), 2014
(7) Yaqin Cheng, Hongda Sun, Xiaobin Cui, ShengFeng Deng, Miao Lu, “Combined optical dispersion by prism and arrayed waveguide grating with multiple diffraction orders for Raman spectrometer” Optics and Spectroscopy, 117, 3 pp. 480-485, 2014
(8) Tun Wang, Liu Bin, Shusen Jiang, Hao Rong, Miao Lu, “A local bottom-gate structure with low parasitic capacitance for dielectrophoresis assembly and electrical characterization of suspended nanomaterials” , J. Micromech. Microeng. 24, 055025 (7pp) 2014
(9) Hao Rong, Wei-Qing Lin, Jin-Cheng Zheng, Miao Lu，“Thermal characterization of a bridge-link carbon nanotubes array used as a thermal adhesive”International Journal of Adhesion & Adhesives pp.4958–63，2014
(10) Zhao Wu，Qing-na Wang， Hong-da Sun and Miao Lu，“Shape-controllable polymeric microlens array duplicated by electrostatic force deformed template”，Optical Engineering 52(6)，063401，2013
(11) Hao Rong, Baoming Wang, Lichao Sun, Huiqiong Wang, Miao Lu, “Fluidic aligned, dense SWNTs arrays as potential die adhesive and thermal interface material”, Soldering & Surface Mount Technology, 25(1), pp. 45-50，2013
(12) Feng Zhu, Jiawei Yan![]()
, Miao Lu, Yongliang Zhou, Yang Yang and Bingwei Mao，“A strategy for selective detection based on interferent depleting and redox cycling using the plane-recessed microdisk array electrodes”， Electrochimica Acta 56，pp. 8101-8107, 2011.
(13) Yang Yang, Jun-Yang Liu, Zhao-Bin Chen, Jing-Hua Tian, Xi Jin, Bo Liu, Xiulan Li, Zhong-Zi Luo, Miao Lu, Fang-Zu Yang, Nongjian Tao and Zhong-Qun Tian， “Conductance histogram evolution of an EC-MCBJ fabricated Au atomic point contact”, Nanotechnology, 22, 27, 275313, 2011
(14) Yi Luo, Miao Lu, and Tianhong Cui “A Polymer-Based Bidirectional Micropump Driven by a PZT Bimorph”, Journal of Microsystem Technologies，17, 3, pp. 430-409, 2011
(15) Miao Lu, Jijun Xiong and Tianhong Cui,“A Flexible Tri-Axis Contact Force Sensor for Tubular Medical Device Applications” J. Micromech. Microeng. 21, 035004 (8pp), 2011
(16) Miao Lu, Xuekun Lu, Min-Woo Jang, Stephen A. Campbell, and Tianhong Cui，“Characterization of Carbon Nanotube Nanoswitches with Gigahertz Resonance Frequency and Low Pull-in Voltages Using Electrostatic Force Microscopy” J. Micromech. Microeng. 20, 105016 (7pp), 2010
(17) Miao Lu, M-W. Jang, S. A. Campbell, T. H. Cui, “aligned dense single-walled carbon nanotube beams and cantilevers for nanoelectromechanical systems applications”, Journal of Vacuum Science and Technology B 28(3), pp. 522-526, 2010
(18) Miao Lu, Dongjin Lee, Taiho Yeomx, Tianhong Cui, “Micro Tactile Sensors with a Suspended and Oriented Single Walled Carbon Nanotube Beam Embedded in Polydimethylsiloxane Elastomer” Sensors Letters. Vol. 8, 639–644, 2010
(19) Miao Lu, M-W. Jang, G. Haugstad, S. A. Campbell, T. H. Cui, “Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization” Appl. Phys. Lett. 94, 261903, 2009
(20) Miao Lu, Dongjin Lee, Wei Xue,and Tianhong Cui “Flexible and Disposable Immunosensor based on Layer-by-Layer Self-Assembled Carbon Nanotubes and Biomolecules” Sensors & Actuators A Volume 150, Issue 2, pp. 280-285, 2009
(21) Li, Li; Zhao, Zhengping; Zhang, Zhiguo; Guo, Wensheng; Lu, Miao; Yang, Ruixia “Development of a MEMS-based RF low-phase-noise voltage controlled oscillator” 半导体学报, v 27, n 5, May, p 900-904 , 2006
(22) Shan F Q, Lu Miao, Gao B X “Rectangular Increasing Distance Spiral Slots (RIDSS) PBG Applied to MEMS Frequency-Reconfigurable Antenna Design” Microwave and Optical Technology Letters Vol.47, Issue.4, page 394-395, 2005
(23) R. H. Guo, Z. P. Zhao and Miao Lu, “Retention Model of Single-Electron Memory (SEM) Using Disintegration Theory” International Journal of Nonlinear Sciences and Numerical Simulation, 2005, v.6 n.4, 431-434.
Guo, Rong-Hui; Zhao, Zheng-Ping; Hao, Yue; Liu, Yu-Gui; Wu, Yi-Bin; Lu, Miao “Realization and Output Characteristics Analysis of the Multiple Islands Single-Electron Transistors “ 物理学报, v 54, n 4, April, 2005, p 1804-1808
(25) Lu,shuhai; Luo, Rong; Yang, Yongjun; Lu, Miao; “Application of SDB technique in a MEMS accelerometer” 机械工程学报 2005, 12(s), 434-436
(26) Luo, Rong; Xu, Aidong; Wang, Wei; Lu, Miao; “Realization of a rapid micro oscillating PCR chip 机械工程学报 2005, 12(s), 88-90
(27) Li, Qian; Zhao,Rihua; Lu,Miao; Hu, Xiaodong; “Design and realization of a low loss X-Band RF MEMS bandpass filter” 机械工程学报2005, 12(s), 231-234
(28) Lin, Haifeng; Lu, Miao; Yang, Yongjun; Shi, Qian; En, Yunfei; “Reliability considerations and experiments of MEMS capacitive accelerometers” 机械工程学报 2005, 12(s), 231-234
(29) Lu Miao, Zhao Zhengping, Hu Xiaodong, Zou Xuefeng, Guo Hejun “Microelectromechanical System Switching Isolation Amplifier for Low Frequency Measurement” Journal of Microlithography, Microfabrication, and Microsystems, 2004, July, 467-471.
(30) Lu miao, Zhao Zhengping, Lou Jianzhong, Gu Hongming, Hu Xiaodong, Li Qian “Thermal Effects and RF Power Handling of a DC-5GHz MEMS Switch” 半导体学报, 2004, 25(7), 749-755.英文版
(31) Lou, Jianzhong; Zhao, Zhengping; Yang, Ruixia; Lu, Miao; Hu, Xiaodong, “DC-to-32 GHz 2 bit MEMS phase shifter” 半导体学报, 2004, 25 (11) p 1386-1390
(32) Gu, Hongming; Lu, Miao; Liang, chunguang; Gao Baoxing; “MEMS class E amplifier” 半导体学报, v 24, n 4, April, 2003, p 401-405
(33) Lu Miao, Zhao Zhengping, Hu Xiaodong, Zou Xuefeng, Lin Haifeng and Guo Ronghui “Adaptive Contact for Improving the Behavior of Silicon MEMS Switches”. J. Micromech. Microeng. 2002, 12, 696-701.
(34) Miao Lu, Yan-Jun Zhao, Xiao-Dong Hu, Xue-Feng Zou, Zheng-Ping Zhao, “Measurement of Adhesive Force between Micro Surfaces With a Novel Micro Leverage Structure” International Journal of Nonlinear Sciences and Numerical Simulation, 2002, 3(3), 419-422.
(35) Xiao-Dong Hu, Jing Pan, Miao Lu, Xue-Feng Zou, Hai-Feng Lin, “Failure Mechanisms of a Micro Fabricated Relay” International Journal of Nonlinear Sciences and Numerical Simulation 2002, 3(3), 361-364.
(36) Cui Tianhong, Zhou Zhaoying, Wang Xiaohao, Ye Xiongying, Yang Yue, Zhang Wendong, Lu Miao, Zhao Yanjun “Key Technologies of Thermally Actuated Silicon Micropump” 机械工程学报 1999, 35(1), 39-42
(37) Yao Yahong, Gao Zhongyu, Lu Miao, Zhao Yongjun, Zhao Yanjun “Study on Fabrication of Micromechanical Inertial Instruments with Bulk Silicon Dissolved Wafer Process”: 清华大学学报 1998, 38(11), 12-15.
(38) Yao Yahong; Zhao Yongjun; Lu Miao; Pi Shun; Li Jiang; Zhao Yanjun “High Aspect Ratio Trench Etching of Si using CCl2Fe2O2 Gas Mixture” 半导体学报 1998, 19(7), 542-547.
Conference paper：
(1) Y. Cheng, S. Deng, Y. Xu, M. Lu*, “Design and Simulation of arrayed waveguide grating (AWG) for micro Raman spectrometer”, Proc. of SPIE, Vol.8419, p.841908, 2012
(2) Z. Wu, H. Sun, S. Jiang, M. Lu*, “Free-form polymeric micro lens array molded by electrostatic force deformed template”, Proc. of SPIE, Vol.8418, p.841807, 2012
(3) B. Wang, H. Rong, and M. Lu*, “Well Aligned Single-Walled Carbon Nanotube (SWNT) Film as a Building Block for MEMS/NEMS Devices” ECS Trans. 44 (1), pp1381-1384, 2012
(4) H. Rong, B. Wang, M. Lu*, “Fluidic aligned, dense SWNTs arrays as potential die adhesive and thermal interface material”, Proc. - Int. Symp. Adv. Packag. Mater. pp. 440-445, 2011
(5) Jang, M.W.; Lu, M.; Cui, T.; Campbell, S.A.; “A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films”Device Research Conference（DRC）2009, PA, USA, June , pp. 29-30，2009
(6) Miao Lu, Dongjin Lee, Taiho Yeomx, Tianhong Cui, “Fabrication of Micro Tactile Sensor With Suspended, Oriented Single Wall Nanotube Beam Embeded In PDMS Elastomer” Transducers’2009, Denver, June, pp. 457-460, 2009
(7) MinWoo jang, Miao Lu, Tianhong Cui, Stephen A. Campbell, “Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly” Transducers’2009, Denver, June, pp.912-915, 2009
(8) Miao Lu, Dongjin Lee, Wei Xue,and Tianhong Cui “Flexible Flexible and Disposable Immunosensor based on Layer-by-Layer Self-Assembled Carbon Nanotubes and Biomolecules” IEEE MEMS 2008, Tucson, U.S.A pp 188-191, 2008
(9) Miao Lu, Amine Bermark and Yi-Kuen Lee “ Fabrication Technology of Piezoresistive Conductive PDMS for Micro Fingerprint Sensors” ![]()
IEEE MEMS 2007, Kobe, Japan, pp.413-416, Jan 21-25, 2007
(10) J. Lu, M. Lu, A. Bermak and Y.-K. Lee, “Study of Piezoresistance Effect of Carbon Nanotube-PDMS Composite Materials for Nanosensors,” IEEE Nano 2007, Hong Kong, pp.1240-1243, Aug 2-5, 2007
(11) Guo, Rong-Hui; Zhao, Zheng-Ping; Lu, Miao, “Analysis of the tunnel junction current” Proceedings of SPIE - The International Society for Optical Engineering, v 5774, Fifth International Conference on Thin Film Physics and Applications, 2005, p 551-554
(12) Jianzhong Lou，Zhengping Zhao, Yang Ruixia, Miao Lu, Xiaodong Hu “A novel DMTL MEMS Phase Shifter” The 4th International Conference on Microwave and Millimeter Wave Technology, Beijing, China August, 2004
(13) Jianzhong Lou，Zhengping Zhao, Yang Ruixia, Miao Lu, Xiaodong Hu “A DC-to-32GHz 2-Bit MEMS Phase Shifter” IEEE Antennas and Propagation Society Symposium, June20~25,2004. Monterey, California June, 2004, pp2867~2870.
(14) Zhengping Zhao, Miao Lu, Shuanqing Li, Yongjun Yang and Yongqing Xu, “MOEMS Devices Based on Developing MEMS Process” SODC’2002 March 10-16 2002, Stuttgart, Germany
(15) Lu Miao, Hu Xiaodong, Zou Xuefeng, Guo Hejun, Zhao Zhengping “An Alternative Silicon Dissolved Process to Prevent Adhesion by “Liquid Bridge”” in Proc. Pacific Rim Workshop on transducers and Micro/Nano Technologies, Xia’Men, China, Aug. 2002.
(16) Xiaodong Hu, Miao Lu, Maohui Hou, Qingguo He, Cuizhuo Gao, Xiwei Bai, Zhengping Zhao “A Compact Serial RF MEMS Switch for S-band Application” Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference, Vol 2, 2001, 733 –738.
(17) Lu Miao, Zhao Zhengping, Hu Maodong, Guo Hejun, Zou Xuefeng, Liu Yanqing, Yang Yong “Testing and Analysis of Lifetime of a Vertical Bulk MEMS switch” Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference, Oct. 2001.
